Surface Modification of DLC Film Due to Oxygen-Plasma Exposure, Observed by IR Absorption Spectroscopy in Multiple-Internal-Reflection Geometry

We investigated the surface modification of diamond-like carbon film during its exposure to oxygen plasma, at different substrate temperatures. Observation of infrared spectral changes reveals that, during plasma exposure, OH groups are formed in the film. With increasing substrate temperature, OH formation suppresses, and hydrogen content decreases. Thus, we speculate that, with increasing temperature during the exposure, insertion of oxygen into C-H bonds decreases, and hydrogen abstraction from the film increases.