Title :
A high-speed low-voltage stress-induced micromachined 2 x 2 optical switch
Author :
Chen, R.T. ; Nguyen, H. ; Wu, M.C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
A low-voltage electrostatically actuated 2×2 fiber optic switch is achieved using a stress-induced curved polysilicon actuator. The curved polysilicon beam substantially lowers the electrostatic operating voltage of the switch. Large mirror displacement (300 μm) and low operating voltage (20 V) are obtained simultaneously. Sub-millisecond switching time (<600 μs), low optical insertion loss (0.7 dB), and small polarization-dependent loss (0.09 dB) have been achieved.
Keywords :
electro-optical switches; electrostatic actuators; high-speed optical techniques; micromachining; optical communication equipment; optical fibre communication; 0.09 dB; 0.7 dB; 20 V; curved polysilicon beam; electrostatic operating voltage; electrostatically actuated 2/spl times/2 fiber optic switch; high-speed low-voltage stress-induced micromachined 2/spl times/2 optical switch; large mirror displacement; low operating voltage; optical insertion loss; polarization-dependent loss; stress-induced curved polysilicon actuator; submillisecond switching time; High speed optical techniques; Insertion loss; Micromechanical devices; Mirrors; Optical crosstalk; Optical losses; Optical switches; Stimulated emission; Structural beams; Voltage;
Journal_Title :
Photonics Technology Letters, IEEE
