DocumentCode
1266800
Title
Resonant Microcantilevers for the Determination of the Loss Modulus of Thin Polymer Films
Author
Ayela, Cédric ; Heinrich, Stephen M. ; Josse, Fabien ; Dufour, Isabelle
Author_Institution
Lab. de l´´Integration du Materiau au Syst., Univ. de Bordeaux, Talence, France
Volume
20
Issue
4
fYear
2011
Firstpage
788
Lastpage
790
Abstract
The increasing interest in polymer materials creates the need for accurate tools to characterize their mechanical properties. Due to energy dissipation in polymers during deformation, these materials exhibit viscoelastic behavior. Accurate determination of these viscoelastic properties and, more specifically, viscous losses, remains challenging and mainly unknown for thin polymer films. In this paper, a straightforward method to determine the loss modulus of organic materials using resonating microcantilevers has been developed. The extracted results for polyisobutylene show the variation of viscous losses over a large range of frequencies (7-350 kHz).
Keywords
cantilevers; deformation; micromechanical devices; polymer films; viscoelasticity; viscosity; deformation; energy dissipation; frequency 350 kHz to 7 kHz; loss modulus; mechanical properties; polyisobutylene; polymer materials; resonant microcantilevers; thin polymer films; viscoelasticity; viscous losses; Coatings; Loss measurement; Polymers; Q factor; Resonant frequency; Silicon; Integrated mechanical characterization; microcantilever; polymer viscoelasticity; quality factor;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2011.2159102
Filename
5944943
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