A 2-MHz 6-kVA voltage-source inverter using low-profile MOSFET modules for low-temperature plasma generators

Author

Fujita, Hideaki ; Akagi, Hirofumi ; Shinohara, Shin-Ichi

Author_Institution

Dept. of Electr. Eng., Okayama Univ., Japan

Volume

14

Issue

6

fYear

1999

fDate

11/1/1999 12:00:00 AM

Firstpage

1014

Lastpage

1020

Abstract

This paper presents a 2 MHz 6 kVA voltage-source inverter for low-temperature plasma generators. A new MOSFET module referred to as a “mega pack” is specially designed and fabricated for high-frequency high-power applications. It has a low-profile package equipped with four terminal plates. The main circuit consists of a single-phase full-bridge inverter using the four new modules. The layout of the modules is characterized by two modules, which are placed back-to-back with each other, forming a half bridge. Both device and circuit designs achieve great reduction of stray inductance in the main circuit. A prototype inverter shows stable operation around frequencies as high as 2 MHz

Keywords

bridge circuits; inductance; invertors; plasma devices; plasma production; power MOSFET; 2 MHz; 6 kVA; MOSFET module; circuit designs; half bridge; high-frequency high-power applications; low-profile MOSFET modules; low-profile package; low-temperature plasma generators; mega pack; modules layout; single-phase full-bridge inverter; stray inductance reduction; terminal plates; voltage-source inverter; Bridge circuits; Circuit synthesis; Frequency; Inductance; Inverters; MOSFET circuits; Packaging; Plasma applications; Prototypes; Voltage;

fLanguage

English

Journal_Title

Power Electronics, IEEE Transactions on

Publisher

ieee

ISSN

0885-8993

Type

jour

DOI

10.1109/63.803394

Filename

803394