• DocumentCode
    1266988
  • Title

    Correction to “A General Methodology to Predict the Reliability of Single-Crystal Silicon MEMS Devices”

  • Author

    Fitzgerald, Alissa M. ; Pierce, David M. ; Huigens, Brent M. ; White, Carolyn D.

  • Volume
    18
  • Issue
    6
  • fYear
    2009
  • Firstpage
    1469
  • Lastpage
    1469
  • Abstract
    In the above titled paper (ibid., vol., 18, no. 4, pp. 962-970, Aug. 2009), there is a typographical error in equation (7). The correct equation is presented here.
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2009.2035674
  • Filename
    5313886
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1266988