• DocumentCode
    1267286
  • Title

    Pulse CO2 laser drilling of green alumina ceramic

  • Author

    Imen, Kamran ; Allen, Susan D.

  • Author_Institution
    Florida State Univ., Tallahassee, FL, USA
  • Volume
    22
  • Issue
    4
  • fYear
    1999
  • fDate
    11/1/1999 12:00:00 AM
  • Firstpage
    620
  • Lastpage
    623
  • Abstract
    Ceramics are used as thermal conductors and electrical insulators in integrated circuit packaging. We have investigated TEA CO2 laser drilling of green alumina ceramic sheets consisting predominantly of alumina with approximately 10% PVB (polyvinyl butyral) as the polymer binder. Experiments with 9.5 and 10.6 μm wavelengths show that the holes made with a 9.5 μm CO2 laser beam, where a larger percentage of the total laser energy is deposited directly into the polymer binder, are smaller, more straight-sided and cleaner
  • Keywords
    ceramic packaging; integrated circuit packaging; laser beam machining; 10.6 micrometre; 9.5 micrometre; CO2; electrical insulators; green alumina ceramic sheets; integrated circuit packaging; polymer binder; pulse laser drilling; thermal conductors; total laser energy; Ceramics; Drilling; Electronic packaging thermal management; Etching; Laser beams; Optical materials; Optical pulses; Polymers; Pulsed laser deposition; Sheet materials;
  • fLanguage
    English
  • Journal_Title
    Advanced Packaging, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1521-3323
  • Type

    jour

  • DOI
    10.1109/6040.803454
  • Filename
    803454
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1267286