Title :
Pulse CO2 laser drilling of green alumina ceramic
Author :
Imen, Kamran ; Allen, Susan D.
Author_Institution :
Florida State Univ., Tallahassee, FL, USA
fDate :
11/1/1999 12:00:00 AM
Abstract :
Ceramics are used as thermal conductors and electrical insulators in integrated circuit packaging. We have investigated TEA CO2 laser drilling of green alumina ceramic sheets consisting predominantly of alumina with approximately 10% PVB (polyvinyl butyral) as the polymer binder. Experiments with 9.5 and 10.6 μm wavelengths show that the holes made with a 9.5 μm CO2 laser beam, where a larger percentage of the total laser energy is deposited directly into the polymer binder, are smaller, more straight-sided and cleaner
Keywords :
ceramic packaging; integrated circuit packaging; laser beam machining; 10.6 micrometre; 9.5 micrometre; CO2; electrical insulators; green alumina ceramic sheets; integrated circuit packaging; polymer binder; pulse laser drilling; thermal conductors; total laser energy; Ceramics; Drilling; Electronic packaging thermal management; Etching; Laser beams; Optical materials; Optical pulses; Polymers; Pulsed laser deposition; Sheet materials;
Journal_Title :
Advanced Packaging, IEEE Transactions on
DOI :
10.1109/6040.803454
