• DocumentCode
    1269609
  • Title

    A Finite-Oxide Thickness-Based Analytical Model for Negative Bias Temperature Instability

  • Author

    Kumar, Sanjay V. ; Kim, Chris H. ; Sapatnekar, Sachin S.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA
  • Volume
    9
  • Issue
    4
  • fYear
    2009
  • Firstpage
    537
  • Lastpage
    556
  • Abstract
    Negative bias temperature instability (NBTI) in PMOS transistors has become a serious reliability concern in present-day digital circuit design. With continued technology scaling, and reducing oxide thickness, it has become imperative to accurately determine its effects on temporal circuit degradation, and thereby ensure reliable operation for a finite period of time. A reaction-diffusion (R-D)-based framework is developed for determining the number of interface traps as a function of time, for both the dc (static NBTI) and the ac (dynamic NBTI) stress cases. The effects of finite oxide thickness, and the influence of trap generation and annealing in polysilicon, are incorporated. The model provides a good fit with experimental data and also provides a satisfying explanation for most of the physical effects associated with the dynamics of NBTI. A generalized framework for estimating the impact of NBTI-induced temporal degradation in present-day digital circuits, is also discussed.
  • Keywords
    MOSFET; annealing; logic design; semiconductor device reliability; NBTI-induced temporal degradation; PMOS transistor; annealing; digital circuit design; dynamic NBTI; finite-oxide thickness; negative bias temperature instability; polysilicon; reaction-diffusion-based framework; static NBTI; trap generation; Delay; frequency independence; negative bias temperature instability (NBTI); oxide thickness; reaction–diffusion (R–D) model;
  • fLanguage
    English
  • Journal_Title
    Device and Materials Reliability, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1530-4388
  • Type

    jour

  • DOI
    10.1109/TDMR.2009.2028578
  • Filename
    5184870