Synthesis of Carbon Nanotubes on Suspending Microstructures by Rapid Local Laser Heating

A chemical vapor deposition (CVD) method using local infrared laser heating is developed for synthesis of carbon nanotubes (CNTs) on suspending microstructures. Adjusting the laser power and the focused beam spot enables local illumination and heating of suspending microstructures to high temperature for CNT growth. Rapid synthesis of multiwalled CNTs on suspending microstructures is successfully achieved. This method provides uniform temperature distribution for self-confined CNT growth, with structure size adaptability. It avoids the need of global heating in conventional CVD synthesis and protects temperature sensitive devices from being damaged. The CNTs are typical in a porous foam manner with the potential in sensor applications.