DocumentCode
1271875
Title
Ge-on-Si approaches to the detection of near-infrared light
Author
Colace, Lorenzo ; Masini, Gianlorenzo ; Assanto, Gaetano
Author_Institution
Dept. of Electron. Eng., Rome Univ., Italy
Volume
35
Issue
12
fYear
36495
fDate
12/1/1999 12:00:00 AM
Firstpage
1843
Lastpage
1852
Abstract
We review our recent results on Ge-based near-infrared photodetectors grown on silicon. We fabricated metal-semiconductor-metal photodetectors based on epitaxial pure-Ge grown on silicon by chemical vapor deposition. Material characterization and device performances are illustrated and discussed. Exploiting a novel approach based on evaporation of polycrystalline-Ge on silicon, we also realized efficient near-infrared photodiodes with good speed and sensitivity. Finally, multiple-element devices were designed, fabricated, and tested, such as a voltage-tunable wavelength-selective photodetector based on a SiGe superlattice and a linear array of 16 photodetectors in poly-Ge on Si
Keywords
CVD coatings; chemical vapour deposition; elemental semiconductors; germanium; infrared detectors; integrated optoelectronics; metal-semiconductor-metal structures; photodetectors; photodiodes; semiconductor epitaxial layers; semiconductor heterojunctions; semiconductor superlattices; semiconductor thin films; vapour phase epitaxial growth; Ge-Si; Ge-on-Si approaches; Si; SiGe superlattice; chemical vapor deposition; device performances; efficient near-infrared photodiodes; epitaxial pure-Ge; evaporation; fabrication; heterojunctions; integrated optoelectronics; linear array; material characterization; metal-semiconductor-metal photodetectors; multiple-element devices; near-infrared light detection; near-infrared photodetectors; optical communications; polycrystalline-Ge; review; sensitivity; testing; voltage-tunable wavelength-selective photodetector; Chemical vapor deposition; Circuit testing; Germanium silicon alloys; Integrated circuit technology; Optical arrays; Optical interconnections; Photodetectors; Silicon germanium; Superlattices; Very large scale integration;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/3.806596
Filename
806596
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