Title :
Phase-locked two-dimensional arrays of implant isolated vertical cavity surface emitting lasers
Author :
Yoo, H.-J. ; Hayes, J.R. ; Paek, E.G. ; Harbison, J.P. ; Florez, L.T. ; Kwon, Y.S.
Author_Institution :
Bellcore, Red Bank, NJ, USA
Abstract :
The fabrication and characterisation of two-dimensional phase-locked arrays of vertical cavity surface emitting lasers is reported. The three two-dimensional array structures characterised were a 2*3 periodic array of 10 mu m2 lasers, a hexagonal array and a centred hexagonal array of 5 mu m hexagonal lasers. All arrays were fabricated using the same technique which was a combination of mesa etching and oxygen implantation isolation.
Keywords :
III-V semiconductors; aluminium compounds; distributed Bragg reflector lasers; gallium arsenide; ion implantation; semiconductor laser arrays; sputter etching; Al 0.5Ga 0.5As; AlGaAs-GaAs; In 0.2Ga 0.8As; centred hexagonal array; hexagonal array; hexagonal lasers; implant isolated vertical cavity surface emitting lasers; mesa etching; oxygen implantation isolation; two-dimensional phase-locked arrays;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19901258
