Title :
Lateral Si avalanche photodiode fabricated over an etched interdigital mesa
Author :
Choi, Y.-I. ; Chung, Shih-Kai
Abstract :
A lateral Si avalanche photodiode suitable for monolithic integrated circuits is fabricated over an etched interdigital mesa. The lateral structure ensures pure electron injection exhibiting no wavelength dependence of the multiplication and the multiplication noise. Substantial enhancement in the quantum efficiency at short wavelengths was observed.
Keywords :
avalanche photodiodes; elemental semiconductors; etching; integrated optoelectronics; silicon; etched interdigital mesa; lateral Si avalanche photodiode; monolithic integrated circuits; multiplication noise; pure electron injection; quantum efficiency; short wavelengths;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19901259
