• DocumentCode
    1272394
  • Title

    Lateral Si avalanche photodiode fabricated over an etched interdigital mesa

  • Author

    Choi, Y.-I. ; Chung, Shih-Kai

  • Volume
    26
  • Issue
    23
  • fYear
    1990
  • Firstpage
    1946
  • Lastpage
    1947
  • Abstract
    A lateral Si avalanche photodiode suitable for monolithic integrated circuits is fabricated over an etched interdigital mesa. The lateral structure ensures pure electron injection exhibiting no wavelength dependence of the multiplication and the multiplication noise. Substantial enhancement in the quantum efficiency at short wavelengths was observed.
  • Keywords
    avalanche photodiodes; elemental semiconductors; etching; integrated optoelectronics; silicon; etched interdigital mesa; lateral Si avalanche photodiode; monolithic integrated circuits; multiplication noise; pure electron injection; quantum efficiency; short wavelengths;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19901259
  • Filename
    59538
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1272394