Title :
Degradation of High-Frequency Noise in nMOSFETs Under Different Modes of Hot-Carrier Stress
Author :
Su, Hao ; Wang, Hong ; Liao, Hong ; Hu, Hang
Author_Institution :
Dept. of Process Integration, United Microelectron. Corp., Singapore, Singapore
Abstract :
In this paper, high-frequency noise under different hot-carrier (HC) stress modes in nMOSFETs has been characterized and analyzed. The experimental results revealed a significant larger increase in NFmin and Rn under maximum substrate current IB, max stress or hot hole injection Hinj than hot electron injection Einj. It is suggested that the difference in high-frequency noise after stress strongly depends on the type of defects generated during HC stresses. Our results provide experimental verification that the shallow interface states/traps at the Si/SiO2 interface introduced by HC stress play an important role in the degradation of high-frequency channel noise.
Keywords :
MOSFET; hot carriers; interface states; semiconductor device noise; silicon compounds; Si-SiO2; high-frequency channel noise; hot electron injection; hot hole injection; hot-carrier stress; interface states; interface traps; nMOSFET; substrate current; Charge carrier processes; Degradation; Hot carriers; MOSFETs; Noise measurement; Radio frequency; Stress; Channel noise; RF metal–oxide–semiconductor field-effect transistors (MOSFETs); hot carrier (HC); semiconductor device noise;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2012.2212022
