Topology optimization of electrostatic actuator using design sensitivity

Author

Byun, Jin-Kyu ; Park, Il-Han ; Hahn, Song-Yop

Author_Institution

Seoul Nat. Univ., South Korea

Volume

38

Issue

2

fYear

2002

fDate

3/1/2002 12:00:00 AM

Firstpage

1053

Lastpage

1056

Abstract

In this paper, a topology optimization approach is used for the design of an electrostatic actuator that can be manufactured using microelectromechanical system (MEMS) technology. The design goal is to obtain constant maximum torque by properly distributing dielectric material in the rotor design space. The objective function is defined for the difference of the system energy to be maximized with respect to the rotation of the rotor. The detailed design with unique rotor pole shape is achieved. Also, the effects of mesh size and initial conditions on final rotor shape are discussed

Keywords

electronic design automation; electrostatic actuators; optimisation; rotors; topology; torque; MEMS technology; constant maximum torque; design sensitivity; dielectric material; electrostatic actuator; electrostatic actuator design; final rotor shape; initial conditions; mesh size; microelectromechanical system technology; objective function; rotor design space; rotor pole shape; rotor rotation; system energy; topology optimization; Design optimization; Dielectric materials; Electrostatic actuators; Microelectromechanical systems; Micromechanical devices; Pulp manufacturing; Shape; Space technology; Topology; Torque;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.996270

Filename

996270