Title :
Optical limitations to cell size reduction in IT-CCD image sensors
Author :
Satoh, Takashi ; Mutoh, Nobuhiko ; Furumiya, Masayuki ; Murakami, Ichiro ; Suwazono, Shinobu ; Ogawa, Chihiro ; Hatano, Keisuke ; Utsumi, Hiroaki ; Kawai, Shinichi ; Arai, Kouichi ; Morimoto, Michihiro ; Orihara, Kozo ; Tamura, Takao ; Teranishi, Nobukazu
Author_Institution :
Syst. Micro Div, NEC Corp., Kanagawa, Japan
fDate :
10/1/1997 12:00:00 AM
Abstract :
We have determined the practical limits of cell size reduction in interline-transfer charge-coupled device (IT-CCD) image sensors, which result from diffraction occurring at the aperture above the photodiode. We have found that image cell size cannot be reduced to a level for which aperture width would fall below about 0.2 μm. We have also found, however that image cells with greater than 0.2 μm aperture size are sensitive over the entire wavelength range of visible light, and that sensitivity can be increased by thinning the photoshield film
Keywords :
CCD image sensors; high definition television; light diffraction; photodiodes; 0.2 mum; HDTV; IT-CCD image sensors; aperture; aperture size; cell size reduction; diffraction; image cell size; interline-transfer charge-coupled device; optical limitations; photodiode; photoshield film thinning; practical limits; sensitivity; visible light wavelength range; Apertures; Diffraction; Digital cameras; HDTV; Image sensors; Lenses; National electric code; Optical films; Optical sensors; Photodiodes;
Journal_Title :
Electron Devices, IEEE Transactions on
