CCD-based magnetic field imaging

Author

O, Nixon ; Nathan, Arokia

Author_Institution

DALSA Inc., Waterloo, Ont., Canada

Volume

44

Issue

10

fYear

1997

fDate

10/1/1997 12:00:00 AM

Firstpage

1653

Lastpage

1657

Abstract

A linear array similar to a photodiode line-scan CCD, but with MOS magnetic sensors replacing the photodiodes, has been fabricated. Magnetic signals are collected as charges and read out as in a conventional CCD. The magnetic sensor pixels have been optimized and exhibit sensitivities of up to 109.7%/Tesla [1.097%(10 mT)], which is 14.7 times the 7%/Tesla sensitivity normally found in CMOS magnetic sensors. The 1/f noise likewise decreases by more than an order of magnitude. The improved performance over CMOS is possible because of superior magnetic sensing properties resulting from buried-channel conduction, and because the CCD readout allows the sensors to be optimized independently of the readout circuitry

Keywords

1/f noise; CCD image sensors; magnetic sensors; semiconductor device noise; 1/f noise; 10 mT; CCD readout; CCD-based magnetic field imaging; MOS magnetic sensors; buried-channel conduction; linear array; magnetic sensing properties; CMOS process; Charge coupled devices; Electron mobility; Magnetic circuits; Magnetic fields; Magnetic noise; Magnetic sensors; Photodiodes; Sensor arrays; Solid state circuits;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.628818

Filename

628818