The constraints on the design and use of silicon-diaphragm pressure sensors
Author :
Greenwood, J.H.
Author_Institution :
ERA Technology Ltd., Leatherhead, UK
Volume :
29
Issue :
2
fYear :
1983
fDate :
2/1/1983 12:00:00 AM
Firstpage :
170
Lastpage :
174
Abstract :
As with all devices, the silicon-diaphragm pressure sensor has limitations to both its design and field of application. This article highlights the types of compromise the designer of such devices is forced to make
