Different Nanostructures From Different Plasmas: Nanoflowers and Nanotrees on Silicon

Author

Ostrikov, K. ; Kumar, S. ; Cheng, Q.J. ; Rider, A.E. ; Yajadda, M.M.A. ; Han, Z.J. ; Seo, D.H. ; van der Laan, T.A. ; Yick, S. ; Tam, E. ; Levchenko, I.

Author_Institution

CSIRO Mater. Sci. & Eng., Lindfield, NSW, Australia

Volume

39

Issue

11

fYear

2011

Firstpage

2796

Lastpage

2797

Abstract

Using the advanced radio-frequency plasma-assisted magnetron deposition system, various nanostructures such as nanoflowers of carbon nanotubes, ZnO nanobelts, and silicon nanotrees were successfully synthesized. In this paper, we present the photographs of ICP and magnetron discharges, the photograph of a complex plasma structure, and the SEM images of various nanostructures synthesized in the system with magnetron and ICP sources operating simultaneously.

Keywords

II-VI semiconductors; carbon nanotubes; elemental semiconductors; nanofabrication; plasma deposition; scanning electron microscopy; silicon; wide band gap semiconductors; zinc compounds; C; SEM; Si; ZnO; ZnO nanobelts; carbon nanotubes; complex plasma structure; magnetron discharges; nanoflowers; radio-frequency plasma-assisted magnetron deposition; silicon nanotrees; Magnetic resonance imaging; Magnetic separation; Nanostructures; Plasmas; Radio frequency; Silicon; Substrates; Plasma applications; plasma materials processing; plasma sources;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2011.2159022

Filename

5957324