Investigation of Variation Power and Additive Gas Effect on the $\hbox {SF}_{6}$ Destruction Using Atmospheric Microwave Plasma Torch

An atmospheric microwave plasma torch for the decomposition of SF₆ accompanying additive gases (O₂ , compressed air) was investigated experimentally in this paper. Applied microwave power and additive gas species as effective parameters on destruction and removal efficiency (DRE) were considered. It was approved that compressed air is a more efficient additive gas for the removal of SF₆ compared to oxygen. Also, DRE is highly dependent on the variation of forward power. Highest efficiencies while using oxygen and compressed air as additive gases have been 98.4% and 99.1% (in 1100 W), respectively. In some case, the N₂ was also used with SF₆, resulting in a maximum efficiency (in 1100 W) of 99.4%. This paper approves that a microwave plasma torch sustained in atmospheric pressure can almost completely remove the SF₆ in semiconductor industry.