• DocumentCode
    1276326
  • Title

    Induction of Gaseous and Metal Source Plasmas by Carbon Shunting Arc

  • Author

    Aoki, Hironori ; Takahashi, Kazunori ; Takaki, Koichi ; Fujiwara, Tamiya

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Iwate Univ., Iwate, Japan
  • Volume
    39
  • Issue
    11
  • fYear
    2011
  • Firstpage
    2912
  • Lastpage
    2913
  • Abstract
    Nitrogen and titanium plasmas were induced by a carbon shunting arc discharge. The carbon shunting arc was produced with a carbon rod which was held vertically between a pair of titanium plane electrodes. A pair of the titanium plane electrodes was used to generate the titanium-containing plasma. Nitrogen gas was injected around the carbon rod to produce nitrogen-containing plasma. A blue light emission was observed from the plasma induced by the carbon shunting arc without nitrogen gas injection. The color of the plasma changed to purple with the injection of nitrogen gas at 10-Pa gas pressure. It was confirmed from a spectroscopic observation that the produced plasma contained carbon and titanium ions without nitrogen injection. The spectra of nitrogen species were also confirmed by injecting nitrogen at 10-Pa gas pressure.
  • Keywords
    arcs (electric); carbon; electrodes; nitrogen; plasma diagnostics; plasma pressure; plasma sources; titanium; C; N; Ti; blue light emission; carbon ions; carbon rod; carbon shunting arc discharge; gaseous source plasma induction; metal source plasma induction; nitrogen gas; nitrogen plasmas; nitrogen species spectra; plasma color; pressure 10 Pa; spectroscopic observation; titanium ions; titanium plane electrodes; titanium plasmas; Arc discharges; Carbon; Electrodes; Ions; Nitrogen; Plasmas; Titanium; Plasma-based ion implantation; shunting arc; titanium ion;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2011.2158591
  • Filename
    5957334