Title :
Reversed Nonlinear Oscillations in Lamé-Mode Single-Crystal-Silicon Microresonators
Author :
Zhu, Haoshen ; Lee, Joshua E -Y
Author_Institution :
Dept. of Electron. Eng., City Univ. of Hong Kong, Kowloon, China
Abstract :
The spring hardening effect is reported here for the first time in a single-crystal-silicon bulk mode resonator. Reversing nonlinear behaviors (changing from spring softening to hardening) has been observed in fabricated silicon-on-insulator square-plate resonators of identical dimensions but aligned against different crystal orientations. This orientation-dependent reversal in the nonlinearity is explained using a dynamic model which incorporates a nonlinear strain-stress relation. The frequency response of the devices (with different dimensions) under various driving conditions can be closely predicted using the model.
Keywords :
crystal orientation; elemental semiconductors; frequency response; micromechanical resonators; silicon; silicon-on-insulator; stress-strain relations; Lamé-mode single-crystal-silicon microresonators; Si; crystal orientations; dynamic model; frequency response; nonlinear strain-stress relation; orientation-dependent reversal; reversed nonlinear oscillations; silicon-on-insulator square-plate resonators; single-crystal-silicon bulk mode resonator; spring hardening effect; Microcavities; Oscillators; Radio frequency; Silicon; Softening; Springs; Vibrations; MEMS; micromechanical resonator; nonlinearity; single-crystal silicon (SCS);
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2012.2210021
