Reversed Nonlinear Oscillations in Lamé-Mode Single-Crystal-Silicon Microresonators

Author

Zhu, Haoshen ; Lee, Joshua E -Y

Author_Institution

Dept. of Electron. Eng., City Univ. of Hong Kong, Kowloon, China

Volume

33

Issue

10

fYear

2012

Firstpage

1492

Lastpage

1494

Abstract

The spring hardening effect is reported here for the first time in a single-crystal-silicon bulk mode resonator. Reversing nonlinear behaviors (changing from spring softening to hardening) has been observed in fabricated silicon-on-insulator square-plate resonators of identical dimensions but aligned against different crystal orientations. This orientation-dependent reversal in the nonlinearity is explained using a dynamic model which incorporates a nonlinear strain-stress relation. The frequency response of the devices (with different dimensions) under various driving conditions can be closely predicted using the model.

Keywords

crystal orientation; elemental semiconductors; frequency response; micromechanical resonators; silicon; silicon-on-insulator; stress-strain relations; Lamé-mode single-crystal-silicon microresonators; Si; crystal orientations; dynamic model; frequency response; nonlinear strain-stress relation; orientation-dependent reversal; reversed nonlinear oscillations; silicon-on-insulator square-plate resonators; single-crystal-silicon bulk mode resonator; spring hardening effect; Microcavities; Oscillators; Radio frequency; Silicon; Softening; Springs; Vibrations; MEMS; micromechanical resonator; nonlinearity; single-crystal silicon (SCS);

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2012.2210021

Filename

6291747