Title :
The process engineer´s workbench
Author :
Strojwas, Andrzej J. ; Director, Stephen W.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie-Mellon Univ., Pittsburgh, PA, USA
fDate :
4/1/1988 12:00:00 AM
Abstract :
A workstation-based implementation of a software system aimed at VLSI fabrication process synthesis is described. The system provides a versatile user interface to a number of process design aids, and incremental simulation capability, and an attractive graphical display of simulation results
Keywords :
CAD; VLSI; circuit layout CAD; engineering workstations; integrated circuit manufacture; integrated circuit technology; semiconductor technology; VLSI fabrication process synthesis; graphical display of simulation results; incremental simulation capability; process CAD; process design aids; process engineer´s workbench; process engineering; software system; user interface; workstation-based implementation; Circuit simulation; Computational modeling; Design automation; Displays; Etching; Fabrication; Fluctuations; Process design; Software systems; User interfaces; Very large scale integration;
Journal_Title :
Solid-State Circuits, IEEE Journal of
