DocumentCode
1277634
Title
Surface tension powered self-assembly of 3-D micro-optomechanical structures
Author
Syms, Richard R A
Author_Institution
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
Volume
8
Issue
4
fYear
1999
fDate
12/1/1999 12:00:00 AM
Firstpage
448
Lastpage
455
Abstract
A new surface micromachining process for surface tension powered self-assembly of silicon-based microstructures is described. Mechanical parts are formed from bonded silicon-on-insulator material and rotated out-of-plane by melting photoresist pads at tow temperature. Simple mechanisms that allow accurate control of the final angle are introduced and used to construct fixed 45° mirrors and scanning mirror assemblies
Keywords
micro-optics; micromachining; mirrors; optical fabrication; self-assembly; silicon-on-insulator; surface tension; 3D micro-optomechanical structure; Si; bonded silicon-on-insulator material; fixed mirror; photoresist; scanning mirror; self-assembly; silicon microstructure; surface micromachining; surface tension; Assembly; Bonding; Micromachining; Microstructure; Mirrors; Resists; Self-assembly; Silicon on insulator technology; Surface tension; Temperature;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.809060
Filename
809060
Link To Document