Title :
Surface tension powered self-assembly of 3-D micro-optomechanical structures
Author :
Syms, Richard R A
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
fDate :
12/1/1999 12:00:00 AM
Abstract :
A new surface micromachining process for surface tension powered self-assembly of silicon-based microstructures is described. Mechanical parts are formed from bonded silicon-on-insulator material and rotated out-of-plane by melting photoresist pads at tow temperature. Simple mechanisms that allow accurate control of the final angle are introduced and used to construct fixed 45° mirrors and scanning mirror assemblies
Keywords :
micro-optics; micromachining; mirrors; optical fabrication; self-assembly; silicon-on-insulator; surface tension; 3D micro-optomechanical structure; Si; bonded silicon-on-insulator material; fixed mirror; photoresist; scanning mirror; self-assembly; silicon microstructure; surface micromachining; surface tension; Assembly; Bonding; Micromachining; Microstructure; Mirrors; Resists; Self-assembly; Silicon on insulator technology; Surface tension; Temperature;
Journal_Title :
Microelectromechanical Systems, Journal of
