Analytical charge collection and MTF model for photodiode-based CMOS imagers

Author

Lin, Chi-Shao S. ; Mathur, Bimal P. ; Chang, Mau-Chung F.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

49

Issue

5

fYear

2002

fDate

5/1/2002 12:00:00 AM

Firstpage

754

Lastpage

761

Abstract

An analytical charge collection model is derived to assess the impact of the photodiode size, doping profile and surface recombination velocity on the modulation transfer function (MTF) and the charge collection efficiency of CMOS imagers. The effects of the microlens and optical isolation are also quantitatively analyzed. The calculated MTF results agree well with measured data of fabricated imagers based on three different pixel designs

Keywords

CMOS image sensors; doping profiles; integrated circuit modelling; microlenses; optical transfer function; photodiodes; surface recombination; MTF model; analytical charge collection model; charge collection efficiency; doping profile; microlens; modulation transfer function; optical isolation; photodiode size; photodiode-based CMOS imagers; pixel design; quantum efficiency; spatial resolution; surface recombination velocity; Analytical models; Doping profiles; Image analysis; Lenses; Microoptics; Optical modulation; Photodiodes; Semiconductor device modeling; Semiconductor process modeling; Transfer functions;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.998581

Filename

998581