• DocumentCode
    1278642
  • Title

    Scaling theory for cylindrical, fully-depleted, surrounding-gate MOSFET´s

  • Author

    Auth, Christopher P. ; Plummer, James D.

  • Author_Institution
    Center for Integrated Syst., Stanford Univ., CA, USA
  • Volume
    18
  • Issue
    2
  • fYear
    1997
  • Firstpage
    74
  • Lastpage
    76
  • Abstract
    We present a scaling theory for fully-depleted, cylindrical MOSFET´s. This theory was derived from the cylindrical form of Poisson´s equation by assuming a parabolic potential in the radial direction. Numerical device simulation data for subthreshold slope and DIBL were compared to the model to validate the formula. By employing the scaling theory a comparison with double-gate (DG) MOSFET´s was carried out illustrating an improvement of up to 40% in the minimum effective channel length for the cylindrical device.
  • Keywords
    MOSFET; semiconductor device models; DIBL; Poisson equation; cylindrical device; fully-depleted type; minimum effective channel length; model; numerical device simulation data; scaling theory; subthreshold slope; surrounding-gate MOSFET; Dielectric constant; Dielectric measurements; Geometry; Logic devices; MOSFET circuits; Numerical simulation; Poisson equations; Semiconductor devices; Silicon compounds; Substrates;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/55.553049
  • Filename
    553049