• DocumentCode
    1279451
  • Title

    Threshold voltage model for MOSFETs with high-k gate dielectrics

  • Author

    Liu, Xiaoyan ; Kang, Jinfeng ; Sun, Lei ; Han, Ruqi ; Wang, Yangyuan

  • Author_Institution
    Inst. of Microelectron., Peking Univ., Beijing, China
  • Volume
    23
  • Issue
    5
  • fYear
    2002
  • fDate
    5/1/2002 12:00:00 AM
  • Firstpage
    270
  • Lastpage
    272
  • Abstract
    An analytic threshold voltage model, which can account for the short channel effect and the fringing field effect of sub-100 nm high-k gate dielectric MOSFETs, has been developed. The model considers the two-dimensional (2D) effect both in silicon bulk and in gate dielectric layer. The results of the model are consistent with 2D numerical simulation results.
  • Keywords
    MOSFET; dielectric thin films; semiconductor device models; MOSFETs; fringing field effect; high-k gate dielectrics; numerical simulation results; short channel effect; threshold voltage model; two-dimensional effect; Analytical models; Boundary conditions; Dielectrics; MOSFETs; Numerical simulation; Poisson equations; Silicon; Sun; Threshold voltage; Two dimensional displays;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/55.998873
  • Filename
    998873