Experimental characterisation and modelling of on-chip capacitors and resistors on GaAs substrates

Author

Yin, W.-Y. ; Wu, B. ; Miao, M. ; Ooi, L.B. ; Li, L.W. ; Kooi, P.S.

Author_Institution

Dept. Electr. & Comput. Eng., Natural Univ. of Singapore, Singapore

Volume

149

Issue

1

fYear

2002

fDate

2/1/2002 12:00:00 AM

Firstpage

50

Lastpage

52

Abstract

Experimental characterisation of various on-chip capacitors and resistors on GaAs substrates is performed, and these capacitor and resistor samples are tested up to 20 GHz using a Cascade 9000^TM analytical RF probe station combined with a de-embedding technique. To accurately extract these passive device parameters, equivalent circuit models are presented for the capacitor and resistor. Excellent agreement is achieved between the measured and simulated data. The chosen circuit models depend on the layout and fabrication technology, and capacitor and resistor geometries

Keywords

III-V semiconductors; MMIC; S-parameters; capacitors; circuit simulation; equivalent circuits; gallium arsenide; integrated circuit measurement; integrated circuit modelling; probes; resistors; 20 GHz; Cascade 9000 analytical RF probe station; GaAs; HP ICCAP software; III V semiconductors; MDS; MMIC; RFIC; SHF; capacitor geometry; circuit models; de-embedding technique; equivalent circuit models; fabrication technology; layout; microwave integrated circuits; on-chip capacitors; on-chip resistors; passive device parameters; radio frequency integrated circuits; resistor geometry; simulated data; substrates; two-port S-parameters;

fLanguage

English

Journal_Title

Microwaves, Antennas and Propagation, IEE Proceedings

Publisher

iet

ISSN

1350-2417

Type

jour

DOI

10.1049/ip-map:20020294

Filename

999102