• DocumentCode
    1280164
  • Title

    High resolution AC temperature field imaging

  • Author

    Forget, B.C. ; Grauby, S. ; Fournier, D. ; Gleyzes, P. ; Boccara, A.C.

  • Author_Institution
    CNRS, Univ. Pierre et Marie Curie, Paris, France
  • Volume
    33
  • Issue
    20
  • fYear
    1997
  • fDate
    9/25/1997 12:00:00 AM
  • Firstpage
    1688
  • Lastpage
    1689
  • Abstract
    Using a CCD camera and a multichannel lock-in scheme, the authors have enhanced the capabilities of photoreflectance microscopy to obtain a 2D image without scanning the sampler thus dramatically reducing the acquisition time. The photoreflectance images presented show Joule and Peltier heating of a polycrystalline Si 1 kΩ resistor across which a 30 mA peak to peak sinusoidal current is forced
  • Keywords
    Peltier effect; integrated circuit testing; microscopy; photoreflectance; temperature distribution; temperature measurement; thermal analysis; 2D image; AC temperature field imaging; CCD camera; Joule heating; LED source; Peltier heating; Si; acquisition time reduction; active ICs; active microstructures; high resolution imaging; multichannel lock-in detection scheme; photoreflectance microscopy; polycrystalline Si resistor;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19971133
  • Filename
    629532