Title :
High resolution AC temperature field imaging
Author :
Forget, B.C. ; Grauby, S. ; Fournier, D. ; Gleyzes, P. ; Boccara, A.C.
Author_Institution :
CNRS, Univ. Pierre et Marie Curie, Paris, France
fDate :
9/25/1997 12:00:00 AM
Abstract :
Using a CCD camera and a multichannel lock-in scheme, the authors have enhanced the capabilities of photoreflectance microscopy to obtain a 2D image without scanning the sampler thus dramatically reducing the acquisition time. The photoreflectance images presented show Joule and Peltier heating of a polycrystalline Si 1 kΩ resistor across which a 30 mA peak to peak sinusoidal current is forced
Keywords :
Peltier effect; integrated circuit testing; microscopy; photoreflectance; temperature distribution; temperature measurement; thermal analysis; 2D image; AC temperature field imaging; CCD camera; Joule heating; LED source; Peltier heating; Si; acquisition time reduction; active ICs; active microstructures; high resolution imaging; multichannel lock-in detection scheme; photoreflectance microscopy; polycrystalline Si resistor;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19971133
