• DocumentCode
    1280197
  • Title

    Electrochemical micromachining of silicon platforms for optical fibre alignment

  • Author

    Guendouz, M. ; Pedrono, N. ; Charrier, J. ; Joubert, P. ; Rouzic, J. Le

  • Author_Institution
    Groupe de Microelectron. et Visualisation, Rennes I Univ., France
  • Volume
    33
  • Issue
    20
  • fYear
    1997
  • fDate
    9/25/1997 12:00:00 AM
  • Firstpage
    1695
  • Lastpage
    1696
  • Abstract
    The authors present an original and low-cost technique for placing and aligning, optical fibres on silicon platforms. Porous silicon obtained by electrochemical etching in delineated areas is used as a sacrificial material. It is shown that this method, which is not dependent on the crystallographic orientations, provides well-defined grooves
  • Keywords
    elemental semiconductors; etching; micromachining; modules; optical fibres; packaging; porous materials; silicon; Si; Si platforms; electrochemical etching; electrochemical micromachining; low-cost technique; optical fibre alignment; optical modules; porous Si; well-defined grooves;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19971166
  • Filename
    629537
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1280197