Title :
Electrochemical micromachining of silicon platforms for optical fibre alignment
Author :
Guendouz, M. ; Pedrono, N. ; Charrier, J. ; Joubert, P. ; Rouzic, J. Le
Author_Institution :
Groupe de Microelectron. et Visualisation, Rennes I Univ., France
fDate :
9/25/1997 12:00:00 AM
Abstract :
The authors present an original and low-cost technique for placing and aligning, optical fibres on silicon platforms. Porous silicon obtained by electrochemical etching in delineated areas is used as a sacrificial material. It is shown that this method, which is not dependent on the crystallographic orientations, provides well-defined grooves
Keywords :
elemental semiconductors; etching; micromachining; modules; optical fibres; packaging; porous materials; silicon; Si; Si platforms; electrochemical etching; electrochemical micromachining; low-cost technique; optical fibre alignment; optical modules; porous Si; well-defined grooves;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19971166
