DocumentCode

1281612

Title

Microstereolithography and other fabrication techniques for 3D MEMS [Book Review]

Author

Wood, David

Volume

11

Issue

2

fYear

2002

fDate

4/1/2002 12:00:00 AM

Firstpage

65

Lastpage

65

fLanguage

English

Journal_Title

Engineering Science and Education Journal

Publisher

iet

ISSN

0963-7346

Type

jour

Filename

999866