Title :
Vector-voltage scanning force probe for noncontact MMIC measurement
Author_Institution :
Dept. of Electr. & Comput. Eng., Manitoba Univ., Winnipeg, Man., Canada
fDate :
9/30/1999 12:00:00 AM
Abstract :
A vector-voltage scanning force probe capable of noncontact high-frequency amplitude and phase measurement at internal points of MMICs is presented. Accurate localised measurements can be made without complex calibration or circuit depassivation. A probe with a 10 GHz bandwidth, <1 fF load and a submicrometre spatial resolution is demonstrated
Keywords :
MMIC; atomic force microscopy; integrated circuit measurement; microwave measurement; phase measurement; 10 GHz; high-frequency amplitude measurement; high-frequency phase measurement; internal points; localised measurements; noncontact MMIC measurement; submicrometre spatial resolution; vector-voltage scanning force probe;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19991154
