Three-Dimensional Hybrid Computer Modeling of Langmuir Probes of Finite Dimensions in Medium Pressure Plasmas

The Langmuir probes are widely used as a diagnostic technique both in low-temperature and high-temperature plasmas. The limitations of the theoretical description of the plasma-probe interaction can be overcome by computer simulations. The presented hybrid model is designed to solve the problems which demand the full 3d3v dimensionality. An iterative method based on an alternation of fluid and particle models is introduced to achieve a high efficiency. A simulation of a finite Langmuir probe with a dielectric holder immersed into the argon plasma serves as an example of the application of our model. The influence of various geometries of both the dielectric holder and the probe on the electron flux to the probe is discussed.