Title :
Planar 1/8 splitter in glass by photoresist masked silver film ion exchange
Author :
Poyhonen, P. ; Honkanen, S. ; Tervonen, A.
Author_Institution :
Nokia Res. Center, Espoo, Finland
fDate :
7/18/1991 12:00:00 AM
Abstract :
Fabrication of singlemode glass waveguide devices by silver film ion exchange with standard photoresist as a mask for the ion exchange is proposed. The process uses the advantages of the silver film ion exchange and the simple and accurate patterning when photoresist is used directly as a mask. As a component example, a singlemode 1/8 power splitter is fabricated and measured.
Keywords :
integrated optics; ion exchange; metallic thin films; optical waveguide components; optical waveguides; optical workshop techniques; silver; Ag film ion exchange; patterning; photoresist masked film; planar splitter; singlemode 1/8 power splitter; singlemode glass waveguide devices; standard photoresist;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19910829
