DocumentCode :
1284369
Title :
2010 IEEE International Electron Devices Meeting (IEDM)
Volume :
23
Issue :
3
fYear :
2010
Firstpage :
490
Lastpage :
490
Abstract :
Prospective authors are requested to submit new, unpublished manuscripts for inclusion in the upcoming event described in this call for papers.
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2010.2060670
Filename :
5536918
Link To Document :
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