Title :
Low-loss PECVD silica channel waveguides for optical communications
Author :
Grand, G. ; Jadot, J.P. ; Denis, H. ; Valette, S. ; Fournier, A. ; Grouillet, A.M.
Author_Institution :
LETI, CEA-CENG, Grenoble, France
Abstract :
The authors report reproducible measurements of propagation losses in channel waveguides fabricated on silicon substrate by PECVD. The average value obtained from more than 50 different channel guides is 0.1 dB/cm at 1.55 mu m. The behaviour with wavelength is also presented and discussed.
Keywords :
integrated optics; optical communication equipment; optical losses; optical waveguides; plasma CVD; silicon compounds; 1.55 micron; IOS2 technology; PECVD; Si; Si-SiO 2; channel waveguides; integrated optics; optical communications; propagation losses; reproducible measurements;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19901375
