DocumentCode
1288753
Title
A new method to measure the distance between graduation lines on graduated scales
Author
Penzes, William B. ; Allen, Richard A. ; Cresswell, Michael W. ; Linholm, Loren W. ; Teague, E.Clayton
Author_Institution
Div. of Precision Eng., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Volume
48
Issue
6
fYear
1999
fDate
12/1/1999 12:00:00 AM
Firstpage
1178
Lastpage
1182
Abstract
Line scales are used throughout industry for a variety of applications. The most common is the stage micrometer, a small, graduated glass scale for the calibration of optical instruments such as microscopes. However, stage micrometers are generally not calibrated, except for critical applications, due to the time and cost of optical calibration techniques. A method for calibrating line scales is presented which uses electrical test structure metrology. A description of the technique as well as examples of results from this technique are presented
Keywords
calibration; distance measurement; measurement uncertainty; micrometry; calibration; electrical test structure metrology; graduated scales; graduation lines; line scales; stage micrometer; Calibration; Glass; Instruments; Laser stability; NIST; Optical interferometry; Optical microscopy; Substrates; Testing; Voltage;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/19.816133
Filename
816133
Link To Document