Title :
Nitrogen ion spectrum from a low energy plasma focus device
Author :
Kelly, Héctor ; Lepone, Alejandro ; Márquez, Adriana
Author_Institution :
Dept. de Fisica, Buenos Aires Univ., Argentina
fDate :
6/1/1997 12:00:00 AM
Abstract :
The nitrogen ion spectrum generated from a low energy Mather-type Plasma Focus device is reported. The main species of ions present are N +1, N+2, and N+3. It is found that its relative concentrations at a distance of several cm from the ion source are in agreement with those predicted for an equilibrium charge-state of the beam, and hence the spectrum of the neutral nitrogen is also derived. By taking into account the lateral spread of the beam due to multiple elastic scattering with the background gas, the derivation of absolute values for the total ion spectrum within the investigated energy range (>170 keV), the total number and total energy of the fast particles has been obtained
Keywords :
ion beams; ion sources; particle beam diagnostics; plasma diagnostics; plasma focus; plasma probes; 170 keV; Mather-type plasma focus device; N; N+2; N+3; N+; background gas; equilibrium charge-state; fast particles; ion source; ion spectrum; lateral beam spread; low energy plasma focus device; multiple elastic scattering; relative concentrations; total ion spectrum; Coatings; Ion beams; Ion sources; Nitrogen; Particle beams; Particle scattering; Plasma applications; Plasma devices; Plasma immersion ion implantation; Plasma sources;
Journal_Title :
Plasma Science, IEEE Transactions on
