DocumentCode
1289440
Title
Nitrogen ion spectrum from a low energy plasma focus device
Author
Kelly, Héctor ; Lepone, Alejandro ; Márquez, Adriana
Author_Institution
Dept. de Fisica, Buenos Aires Univ., Argentina
Volume
25
Issue
3
fYear
1997
fDate
6/1/1997 12:00:00 AM
Firstpage
455
Lastpage
459
Abstract
The nitrogen ion spectrum generated from a low energy Mather-type Plasma Focus device is reported. The main species of ions present are N +1, N+2, and N+3. It is found that its relative concentrations at a distance of several cm from the ion source are in agreement with those predicted for an equilibrium charge-state of the beam, and hence the spectrum of the neutral nitrogen is also derived. By taking into account the lateral spread of the beam due to multiple elastic scattering with the background gas, the derivation of absolute values for the total ion spectrum within the investigated energy range (>170 keV), the total number and total energy of the fast particles has been obtained
Keywords
ion beams; ion sources; particle beam diagnostics; plasma diagnostics; plasma focus; plasma probes; 170 keV; Mather-type plasma focus device; N; N+2; N+3; N+; background gas; equilibrium charge-state; fast particles; ion source; ion spectrum; lateral beam spread; low energy plasma focus device; multiple elastic scattering; relative concentrations; total ion spectrum; Coatings; Ion beams; Ion sources; Nitrogen; Particle beams; Particle scattering; Plasma applications; Plasma devices; Plasma immersion ion implantation; Plasma sources;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.597260
Filename
597260
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