• DocumentCode
    1289925
  • Title

    A novel method for sub-micron particle detection in clean liquids

  • Author

    Madanshetty, Sameer I.

  • Author_Institution
    Dept. of Mech. Eng., Kansas State Univ., Manhattan, KS, USA
  • Volume
    10
  • Issue
    1
  • fYear
    1997
  • fDate
    2/1/1997 12:00:00 AM
  • Firstpage
    11
  • Lastpage
    16
  • Abstract
    A novel approach to the detection of liquid-borne submicrometer particles (extendible to ultra-clean liquids) is described. The key concept is to coax the submicrometer particles to soft cavitate and then detect the ensuing transient bubble activity acoustically rather than the particle itself (which has only a weak scattering signature). The method, therefore, relies on facilitating acoustic microcavitation through acoustic coaxing. Acoustic microcavitation is brought about by low megahertz acoustic fields giving rise to micrometer-size bubbles that live a few microseconds. Liquid-borne microparticles do not, ordinarily, cause any cavitation when exposed to strong sound fields (of 1 MHz). If, however, a very weak, high-frequency auxiliary acoustic field (e.g., 30 MHz) is added to this sound field, cavitation by the microparticles is readily facilitated. This technique of facilitating cavitation is referred to as “acoustic coaxing”. Results of preliminary experiments indicate that even smooth spherical microparticles can be coaxed to cause cavitation. An explanation of the “acoustic coaxing effect” is offered. The physics seems not to be limited by the smallness of microparticles (effect possible up to 50 nm). This novel method based on acoustic coaxing of microcavitation promises to be a good basis for on-line, real time monitoring of liquid-borne submicronic particulates. This method is not limited to small sensing volumes and, unlike optical methods, it has an intrinsic, location specific, signal enhancement at the source particle
  • Keywords
    acoustic applications; acoustic field; bubbles; cavitation; impurities; integrated circuit manufacture; liquids; monitoring; particle counting; ultrasonic applications; ultrasonic scattering; 1 MHz; 30 MHz; HF auxiliary acoustic field; acoustic coaxing; acoustic microcavitation; clean liquids; liquid-borne submicrometer particles; low megahertz acoustic fields; micrometer-size bubbles; online real time monitoring; particulate contaminants; submicron particle detection; transient bubble activity; Acoustic scattering; Acoustic signal detection; Acoustic waves; Coaxial components; Liquids; Monitoring; Optical scattering; Particle scattering; Physics; Rayleigh scattering;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/66.554477
  • Filename
    554477