Closed-loop measurement of equipment efficiency and equipment capacity

Author

Leachman, Robert C.

Author_Institution

Dept. of Ind. Eng. & Oper. Res., California Univ., Berkeley, CA, USA

Volume

10

Issue

1

fYear

1997

fDate

2/1/1997 12:00:00 AM

Firstpage

84

Lastpage

97

Abstract

Formal definitions for the components of efficiency and capacity, mathematical formulas for computing overall efficiency, and data collection strategies are proposed for rigorous measurement of equipment efficiency and equipment capacity. Measurement of overall equipment efficiency (OEE) under the TPM paradigm is extended to support the maintenance of capacity parameters for production planning. The weaknesses or equipment analyzes based on utilization and aggregate UPH (units per hour) figures are contrasted against the robustness of the proposed approach. Applications in semiconductor factories are discussed

Keywords

data acquisition; integrated circuit manufacture; management; planning; production; semiconductor device manufacture; TPM paradigm; aggregate UPH figures; closed-loop measurement; data collection strategies; equipment capacity; equipment efficiency; production planning; semiconductor factories; units per hour figures; Aggregates; Capacity planning; Electronic equipment manufacture; Job shop scheduling; Processor scheduling; Production facilities; Production planning; Productivity; Robustness; Semiconductor device manufacture;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/66.554490

Filename

554490