Title :
Scanning optical microscope
Author :
Sheppard, C.J.R.
Author_Institution :
Pembroke College, Department of Engineering Science, Oxford, UK
fDate :
2/1/1980 12:00:00 AM
Abstract :
The scanning optical microscope uses a laser spot to examine a specimen. This technique improves on the resolution and contrast of the conventional microscope, and so has particular advantages for the study of semiconductor materials and devices and living biological specimens
Journal_Title :
Electronics and Power
DOI :
10.1049/ep.1980.0088
