Title :
Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 varactors directly fabricated on a LiTaO3 wafer
Author :
Kimura, Tomohiro ; Kobayashi, Hideo ; Kishimoto, Yutaka ; Kato, Haruhisa ; Inaba, Masayuki ; Hashimoto, Ken-ya ; Matsumura, Takeshi ; Hirano, Harutoyo ; Kadota, Mitsuhiro ; Esashi, Masayoshi ; Tanaka, Shoji
Author_Institution :
Murata Manuf. Co., Ltd., Kyoto, Japan
Abstract :
A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600°C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42°YX-LiTaO3 wafer was newly developed to prevent performance deterioration in SAW resonators. The bandwidth-tunable filter composed of ten pieces of both surface acoustic wave (SAW) resonators and BST varactors on the 42°YX-LiTaO3 substrate was successfully fabricated using the integration process. The measured center frequency of the filter is 1GHz, and the 3dB bandwidth is electrically tuned from 4.5 to 9.6MHz by adjusting a DC supply voltage from 0 to 10V.
Keywords :
barium compounds; lithium compounds; surface acoustic wave resonators; varactors; wafer level packaging; BST varactors; BaSrTiO3; BaSrTiO3 varactors; LiTaO3; LiTaO3 wafer fabrication; SAW resonators; frequency 1 GHz; frequency 4.5 MHz to 9.6 MHz; high deposition temperature; performance deterioration; prototyped bandwidth-tunable filter; special cared wafer integration process; surface acoustic wave resonators; voltage 0 V to 10 V; Films; Lithium compounds; Radio frequency; Resonator filters; Substrates; Surface acoustic waves; Varactors; BaSrTiO3; LiTaO3; tunable filter;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0195
