A novel MEMS gas sensor based on ultrasonic resonance cavity

Author

Koppinen, P.J. ; Sillanpaa, T. ; Karkkainen, Anu ; Saarilahti, Jaakko ; Seppa, Heikki

Author_Institution

Knowledge Intensive Products & Services (KIPS), VTT Tech. Res. Centre of Finland, Espoo, Finland

fYear

2014

fDate

3-6 Sept. 2014

Firstpage

655

Lastpage

658

Abstract

We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO₂ and methane CH₄, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO₂ sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.

Keywords

acoustic resonators; carbon compounds; gas sensors; microsensors; ultrasonic transducers; CO₂; MEMS gas sensor; capacitive micromachined ultrasonic transducer; carbon dioxide sensors; humidity measurement; low cost sensor; low power sensor; ultrasonic resonance cavity; Acoustics; Cavity resonators; Humidity; Impedance; Resonant frequency; Transducers; Ultrasonic variables measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2014 IEEE International

Conference_Location

Chicago, IL

Type

conf

DOI

10.1109/ULTSYM.2014.0161

Filename

6931795