DocumentCode
1291963
Title
Effect of Dust Particle Growth on the Emission Spectrum of a Complex Plasma
Author
Layden, Brett ; Cheung, Vincent ; Samarian, Alexander A.
Author_Institution
Sch. of Phys., Univ. of Sydney, Sydney, NSW, Australia
Volume
39
Issue
11
fYear
2011
Firstpage
2762
Lastpage
2763
Abstract
The growth of dust particles in a plasma can drastically change the plasma´s properties; importantly, it can affect the electron energy distribution function. We have performed optical emission spectroscopy on an RF sputtering discharge in argon during dust particle growth to analyze this change. We find that the intensities of all of the argon emission lines increase, indicating an increase in the number of high-energy electrons as a result of dust growth.
Keywords
argon; dusty plasmas; high-frequency discharges; plasma transport processes; Ar; RF sputtering discharge; argon emission lines; complex plasma; dust particle growth effect; electron energy distribution function; emission spectrum; high-energy electron analysis; optical emission spectroscopy; Argon; Discharges; Ions; Plasmas; Spectroscopy; Sputtering; Complex plasma; dust particle growth; dusty plasma; electron energy distribution function (EEDF); optical emission spectroscopy; plasma emission;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2011.2160288
Filename
5976461
Link To Document