• DocumentCode
    1291963
  • Title

    Effect of Dust Particle Growth on the Emission Spectrum of a Complex Plasma

  • Author

    Layden, Brett ; Cheung, Vincent ; Samarian, Alexander A.

  • Author_Institution
    Sch. of Phys., Univ. of Sydney, Sydney, NSW, Australia
  • Volume
    39
  • Issue
    11
  • fYear
    2011
  • Firstpage
    2762
  • Lastpage
    2763
  • Abstract
    The growth of dust particles in a plasma can drastically change the plasma´s properties; importantly, it can affect the electron energy distribution function. We have performed optical emission spectroscopy on an RF sputtering discharge in argon during dust particle growth to analyze this change. We find that the intensities of all of the argon emission lines increase, indicating an increase in the number of high-energy electrons as a result of dust growth.
  • Keywords
    argon; dusty plasmas; high-frequency discharges; plasma transport processes; Ar; RF sputtering discharge; argon emission lines; complex plasma; dust particle growth effect; electron energy distribution function; emission spectrum; high-energy electron analysis; optical emission spectroscopy; Argon; Discharges; Ions; Plasmas; Spectroscopy; Sputtering; Complex plasma; dust particle growth; dusty plasma; electron energy distribution function (EEDF); optical emission spectroscopy; plasma emission;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2011.2160288
  • Filename
    5976461