Title :
Single element high frequency (<50 MHz) PZT sol gel composite ultrasound transducers
Author :
Lukacs, Marc ; Sayer, Michael ; Foster, Stuart
Author_Institution :
Dept. of Phys., Queen´´s Univ., Kingston, Ont., Canada
Abstract :
A sol gel composite process has been used to produce lead zirconate titanate coatings in the thickness range of 3 to 100 /spl mu/m on aluminum substrates. The complex permittivity (/spl epsi//sub 33//sup S/), elastic stiffness (c/sub 33//sup D/), and the piezoelectric constant (h/sub 33/) of the coating and the complex elastic stiffness (c/sub 33//sup D/) of the substrate have been determined using impedance measurements and a commercially available software program [Piezoelectric Resonance Analysis Program PRAP 2.0, TASI Technical Software, Kingston, Ontario, Canada]. The complex components of the material parameters account for the losses within the film and the substrate. Sol gel composite films on aluminum have a dielectric constant of 220 with an imaginary component of 1% and an electromechanical coupling coefficient of up to 0.24 with an imaginary component of 3%. These films are applied to the fabrication of a high frequency transducers suitable for ultrasound biomicroscopy (UBM). By combining the sol gel composite material with existing transducer fabrication techniques, single-element focusing transducers have been produced that operate in the frequency range of 70 to 160 MHz. Devices have -6-dB bandwidths up to 52% and minimum insertion losses ranging from -47 to -58 dB. Real-time images of phantom materials and ex vivo biological samples are shown.
Keywords :
acoustic impedance; acoustic microscopy; biomedical transducers; biomedical ultrasonics; digital simulation; elastic constants; lead compounds; permittivity; piezoceramics; piezoelectric thin films; piezoelectric transducers; sol-gel processing; ultrasonic transducers; 3 to 100 mum; 50 MHz; 70 to 160 MHz; Al; PRAP 2.0; PZT; PbZrO3TiO3; Piezoelectric Resonance Analysis Program; aluminum substrates; bandwidth; complex permittivity; composite films; dielectric constant; elastic stiffness; electromechanical coupling coefficient; ex vivo biological samples; imaginary component; impedance measurements; lead zirconate titanate coatings; losses; minimum insertion loss; phantom materials; piezoelectric constant; real-time images; single element high frequency PZT sol gel composite ultrasound transducers; single-element focusing transducers; sol gel composite process; transducer fabrication; ultrasound biomicroscopy; Aluminum; Coatings; Dielectric substrates; Fabrication; Frequency; Impedance measurement; Permittivity; Piezoelectric films; Titanium compounds; Ultrasonic transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on