Folded U-Shaped Microwire Technology for Ultra-Compact Three-Dimensional MMIC´s

Author

Onodera, Kiyomitsu ; Hirano, Makoto ; Tokumitsu, Masami ; Toyoda, Ichihiko ; Nishikawa, Kenjiro ; Tokumitsu, Tsuneo

Author_Institution

NTT System Electronics Laboratories, Atsugi-shi, Kanagawa 24ZZ-O 1, Japan.

Volume

Issue

fYear

1996

fDate

12/1/1996 12:00:00 AM

Firstpage

2347

Lastpage

2710

Keywords

Fabrication; Gallium arsenide; Gold; Helium; Inductors; Insulation; MMICs; Metal-insulator structures; Polyimides; Radio frequency;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

DOI

10.1109/TMTT.1996.554655

Filename

554655

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