DocumentCode :
1295151
Title :
White-light emitting thin-film electroluminescent device using micromachined structure
Author :
Lee, Yun-Hi ; Ju, Byeong-Kwon ; Song, Man-Ho ; Kim, Dong-Ho ; Hahn, Taek-Sang ; Oh, Myung-Hwan
Author_Institution :
Div. of Electron. & Inf. Technol., Korea Inst. of Sci. & Technol., Seoul, South Korea
Volume :
44
Issue :
1
fYear :
1997
fDate :
1/1/1997 12:00:00 AM
Firstpage :
39
Lastpage :
44
Abstract :
A white-light emitting electroluminescent (EL) device with newly developed ZnS:Pr, Ce, F phosphor layer was fabricated inside a micromachined well having four-sided Si mirrors, prepared by anisotropic wet etching of Si (100) wafer. Highly luminant EL was achieved using the Si micromirrors. Furthermore, the EL device utilizing the metallized mirrors incorporated into the glass substrates also exhibited enhanced brightness when compared to the conventional face-emitting EL device
Keywords :
II-VI semiconductors; brightness; cerium; electroluminescent displays; etching; fluorine; micromachining; phosphors; praseodymium; zinc compounds; II-VI semiconductors; ZnS:Pr,Ce,F; anisotropic wet etching; brightness; micromachined structure; micromirrors; phosphor layer; thin-film electroluminescent device; white light emission; Anisotropic magnetoresistance; Electroluminescent devices; Glass; Metallization; Micromirrors; Mirrors; Phosphors; Substrates; Thin film devices; Wet etching;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/16.554789
Filename :
554789
Link To Document :
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