Title :
Fabrication and characteristics of inversion layer LiNbO3 for high frequency ultrasound transducers
Author :
Chen Jin ; Zhitian Zhang ; Chao Zhang ; Shung, K. Kirk ; Qifa Zhou
Author_Institution :
Dept. of Precision Instrum., Tsinghua Univ., Beijing, China
Abstract :
This paper studied the relationship between the ratio of LiNbO3 inversion layer plate and its thickness, annealing time, temperature. Two groups of Y-36°LiNbO3 plate with different thickness between 100 to 500μmand 60 to 200μm were annealed at 1130°C and 1140°C respectively with different time. The inversion layer ratio of the inversion layer ratio of these Y-36° LiNbO3 inverted plates was measured and compared. It is found that it is easier to get a higher inversion layer ratio for a thinner LiNbO3 plate or at a higher annealing temperature, such as 1140°C.
Keywords :
acoustic materials; annealing; inversion layers; lithium compounds; materials preparation; plates (structures); ultrasonic transducers; LiNbO3; annealing time; high frequency ultrasound transducers; inversion layer; inverted plates; size 60 mum to 500 mum; temperature 1130 degC; temperature 1140 degC; Acoustics; Annealing; Lithium niobate; Surface impedance; Transducers; Ultrasonic imaging; Ultrasonic transducers; Ferroelectric domain; High frequency; Inversion layer; Lithium niobate; Ultrasonic transducer;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0388
