Title :
Integration of PZT thin films on a microfluidic complex system
Author :
Cazorla, P.-H. ; Fuchs, O. ; Cochet, M. ; Maubert, S. ; Le Rhun, G. ; Fouillet, Y. ; Defay, E.
Author_Institution :
LETI, Univ. Grenoble Alpes, Grenoble, France
Abstract :
We present a new way to integrate state of the art sol-gel Pb(Zr,Ti)O3 (PZT) thin-films on a microfluidic system and the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. Combination of both technologies enables to benefit of low voltage actuation and high precision. The micropump can produce a 3.6 μl/min flow for 24 V actuation voltage. It is a new step toward low consuming pumps for autonomous microfluidic systems, especially implanted devices for drug delivery.
Keywords :
lead compounds; microactuators; microfluidics; micropumps; microvalves; piezoceramics; piezoelectric actuators; piezoelectric thin films; sol-gel processing; thin film devices; PZT; active microvalves; autonomous microfluidic systems; drug delivery; implanted devices; low voltage actuation; microfluidic complex system; peristaltic micropump; piezoelectric thin films; sol-gel PZT thin films; voltage 24 V; Acoustics; Actuators; Films; Microfluidics; Micropumps; Silicon; Valves; PZT sol-gel thin film; low voltage; micro-pump; peristaltic;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0122
