Title :
Fabrication and characterization of wafer-bonded cMUT arrays dedicated to ultrasound-image-guided FUS
Author :
Gross, Dominic ; Perroteau, Marie ; Certon, Dominique ; Coutier, Caroline ; Legros, Mathieu
Author_Institution :
GREMAN, Univ. Francois Rabelais, Tours, France
Abstract :
In this paper, the development of wafer-bonded cMUTs arrays, which will be implemented on a dual-mode probe dedicated to liposomes activation and high frequency imaging, is presented. The process flow is briefly described, and optical and electrical characterizations are reported. Then, experimental electro-acoustic tests confirming the expected performances of each array are presented and discussed.
Keywords :
acoustoelectric devices; capacitive sensors; ultrasonic focusing; ultrasonic transducers; wafer bonding; dual-mode probe; electrical characterizations; experimental electro-acoustic tests; fabrication; high frequency imaging; liposomes activation; optical characterizations; process flow; ultrasound-image-guided FUS; wafer-bonded cMUT arrays; Acoustics; Fabrication; Imaging; Performance evaluation; Probes; Semiconductor device measurement; Voltage measurement;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0046
