Title :
Surface acoustic wave mass sensor based on 128° YX-cut Lithium Niobate for thermogravimetric analysis
Author :
Hongfei Zu ; Yizhong Wang ; Jiemin Xie ; Huiyan Wu ; Qing-Ming Wang
Author_Institution :
Dept. of Mech. Eng. & Mater. Sci., Univ. of Pittsburgh, Pittsburgh, PA, USA
Abstract :
In this paper, a surface acoustic wave (SAW) mass sensors based on Lithium Niobate (LN) was tested through thermogravimetric analysis (TGA) process up to 450°C. The SAW sensor exhibited good stability and the resonant frequencies decreased linearly with the increase of temperature (the rate was about 5.3 KHz/°C) up to 500°C. PMMA A4 and C9 were deposited as the mass loadings during the TGA process. The mass sensitivity of the sensors was found to be about 13 KHz/μg, which is much higher than the typical QCM microbalance sensors.
Keywords :
lithium compounds; surface acoustic wave sensors; thermal analysis; LiNbOx; SAW mass sensors; TGA process; lithium niobate; mass sensitivity; resonant frequency; surface acoustic wave mass sensor; thermogravimetric analysis; Lithium niobate; Resonant frequency; Sensitivity; Surface acoustic waves; Temperature measurement; Temperature sensors; lithium niobate; mass sensor; surface acoustic wave; thermogravimetric analysis;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0635
