DocumentCode
1298128
Title
High-Q Slow-Wave Coplanar Transmission Lines on 0.35 
m CMOS Process
Author
Kaddour, D. ; Issa, H. ; Franc, A.-L. ; Corrao, N. ; Pistono, E. ; Podevin, F. ; Fournier, J.M. ; Duchamp, J.M. ; Ferrari, P.
Author_Institution
Inst. of Microelectron., Electromagn. & Photonics, IMEP-LAHC, Grenoble, France
Volume
19
Issue
9
fYear
2009
Firstpage
542
Lastpage
544
Abstract
In this letter, experimental results and trends for shielded coplanar waveguide transmission lines (S-CPW) implemented in a 0.35 μm CMOS technology are provided. Because of the introduction of floating strips below the CPW transmission line, high effective dielectric permittivity and quality factor are obtained. Three different geometries of S-CPW transmission lines are characterized. For the best geometry, the measured effective dielectric permittivity reaches 48, leading to a very high slow-wave factor and high miniaturization. In addition, measurements demonstrate a quality factor ranging from 20 to 40 between 10 and 40 GHz, demonstrating state-of-the-art results for transmission lines realized in a low-cost CMOS standard technology.
Keywords
CMOS integrated circuits; Q-factor; coplanar transmission lines; coplanar waveguides; field effect MMIC; slow wave structures; CMOS technology; CPW transmission line; dielectric permittivity; floating strips; frequency 10 GHz to 40 GHz; miniaturization; quality factor; shielded coplanar waveguide; size 0.35 mum; slow-wave coplanar transmission lines; slow-wave factor; CMOS; coplanar transmission lines; slow-wave;
fLanguage
English
Journal_Title
Microwave and Wireless Components Letters, IEEE
Publisher
ieee
ISSN
1531-1309
Type
jour
DOI
10.1109/LMWC.2009.2027053
Filename
5204118
Link To Document